Recently, Optics Valley enterprises have achieved a major breakthrough in the field of semiconductor special photoresists: the T150 A photoresist product launched by Wuhan Taizi Micro Optoelectronics Technology Co., Ltd. (hereinafter referred to as "Taizi Micro Company") has passed the mass production verification of the semiconductor process and realized the independent design of the formula, which is expected to create a new situation in domestic semiconductor lithography manufacturing.
This product is benchmarked against the mainstream KrF photoresist series of international leading enterprises. Compared with the same series of foreign products UV1610, which is called "demon glue" in the industry, T150 A shows the ultimate resolution of 120nm in the lithography process, and the process tolerance is larger, the stability is higher, the film retention rate is excellent, and it is more friendly to the post-etching process.
Taizi Micro was established in May 2024 by the team of Wuhan National Research Center for Optoelectronics of Huazhong University of Science and Technology. The team is based on the research and development of key photoresist underlying technologies, and has been deeply engaged in the field of electronic chemicals for more than 20 years.
Zhu Mingqiang, the person in charge of the company, a member of the Royal Society of United Kingdom Chemistry and a professor of Huazhong University of Science and Technology, said: "Starting from the development of raw materials, and finally obtaining the formula technology with independent intellectual property rights, this is just the beginning, and our team will also develop a series of KrF and ArF photoresists used in different scenarios to bring more surprises to domestic related industries." ”
Members of Taiziwei's core R&D team (the first from the left in the front row is Professor Zhu Mingqiang)
Taizi Micro is committed to the development of high-end electronic chemical materials for semiconductors, and opens up new advanced lithography manufacturing technology for semiconductor manufacturing with new technology routes, and provides the most comprehensive means for the analysis and verification of materials.
"Whether it is from the background of the rise of the domestic semiconductor industry, or from the law of Moore's law evolution to look forward to the future, the situation of 'a hundred schools of thought contending' has been formed, and there will be many new technologies and new enterprises in the field of lithography to break into butterflies, but having the power of scientific and technological innovation is a necessary prerequisite for survival." Taiziwei's external expert consultant said.